CMC Materials

CMC Materials CMP Slurries

Chemical mechanical planarization (CMP) slurries for semiconductor wafer polishing. CMC slurries cover tungsten, copper, dielectric, barrier metal, and STI applications across leading-edge and legacy nodes, now offered through the Entegris specialty chemicals product line.

GitHub

Documentation

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Documentation
https://www.entegris.com/

API entry from apis.yml

apis.yml Raw ↑ 
aid: cmc-materials:cmp-slurries
name: CMC Materials CMP Slurries
tags:
- Semiconductors
- CMP
- Slurries
- Specialty Chemicals
humanURL: https://www.entegris.com/
properties:
- url: https://www.entegris.com/
  type: Documentation
description: Chemical mechanical planarization (CMP) slurries for semiconductor wafer polishing. CMC slurries
  cover tungsten, copper, dielectric, barrier metal, and STI applications across leading-edge and legacy
  nodes, now offered through the Entegris specialty chemicals product line.